液體微粒監控系統
Remote LPC
- 遠程液體粒子計數器系列為您提供所需的連續監測數據。
- 幫助您確定供應到製程的液體始終保持一定的清潔度。
- Remote LPC容易安裝在監控系統中,也容易清潔和維護。
- 不銹鋼材質
- RS485 Modbus、4-20mA
- 校正報告:NIST可追朔
- 2年保固
規格說明
- 標準2 個通道 4~20AmA: 0.1 ~ 5.0µm
- 標準4 個通道 Modbus: 0.1 ~ 5.0µm
- 流量: 100 ml/min
- 雷射光源: Laser Diode
- 採樣濃度限制: 0.1~0.5um 64,000 counts/ml@5% 重合誤差
- 0.2~5.0um 4,000 counts/ml@5% 重合誤差
- 採樣溫度: 0°C to 60°C
- 採樣壓力: 150 PSI
- 重量: 1.58KG ------------------------------------------------------------
- 標準8 個通道 Modbus 和 4個4~20mA : 1.0 ~ 50.0µm 1.0~200.0um
- 流量: 30 ml/min
- 雷射光源: Laser Diode
- 採樣濃度限制:
1.0~50.0um 40,000 counts/ml@5% 重合誤差
1.0~200.0um 50,000 counts/ml@5% 重合誤差 - 採樣溫度: 0°C to 70°C
- 採樣壓力: 150 PSI
- 重量: 1.95KG
其它說明
可量測液體
Water --- H₂O
Deionized Water --- DI H₂O
Nitric Acid 70% --- HNO₃ 70%
Sulphuric Acid 96% --- H₂SO₄
Hydrochloric Acid 37% --- HCL
Ammonium Hydroxide 29% --- NH₄OH
Hydrogen Peroxide 30% --- H₂O₂
Phosphoric Acid 86% --- H₃PO₄
Potassium Hydroxide 1% --- KOH
Isopropyl Alcohol --- IPA
Acetone --- C₂H₂O
N-methyl Perryiodine --- NMP
不可量測液體
Ammonium Fluoride---NH₄F
Hydrofluoric Acid 50% ---HF 50%
Hydrofluoric Acid 5% ---HF 5%
Hydrofluoric Acid 0.5% ---HF 0.5%
Tetramenthylammonium Hydroxide ---TMAH
Buffered Hydrofluoric Acid ---BHF
Buffered Oxide Etch --- BOE
Water --- H₂O
Deionized Water --- DI H₂O
Nitric Acid 70% --- HNO₃ 70%
Sulphuric Acid 96% --- H₂SO₄
Hydrochloric Acid 37% --- HCL
Ammonium Hydroxide 29% --- NH₄OH
Hydrogen Peroxide 30% --- H₂O₂
Phosphoric Acid 86% --- H₃PO₄
Potassium Hydroxide 1% --- KOH
Isopropyl Alcohol --- IPA
Acetone --- C₂H₂O
N-methyl Perryiodine --- NMP
不可量測液體
Ammonium Fluoride---NH₄F
Hydrofluoric Acid 50% ---HF 50%
Hydrofluoric Acid 5% ---HF 5%
Hydrofluoric Acid 0.5% ---HF 0.5%
Tetramenthylammonium Hydroxide ---TMAH
Buffered Hydrofluoric Acid ---BHF
Buffered Oxide Etch --- BOE