QIII Probes
Surface Particle Detection (SPD)
Pentagon Technologies’ line of surface particle detectors are the standard in high technology industries for measuring and controlling surface contamination. Particles that accumulate on critical surfaces or products can reduce yield and reliability.
Specification
- 1/2" Probe:
Most Versatile. Part Number: 4400141
PPLICATIONS: Process chamber walls, kit parts, robot arms, slit valve openings, ESC edges, bellows, and tight spaces. - 2" Probe:
Straight .Part Number: 4400140
APPLICATIONS: Process chamber walls and floors, large kit part surfaces, cleanroom surfaces, work areas. - Pencil Probe:
Part Number: 4400716
APPLICATIONS: Static readings of cavities, screw & bolt holes, hard to reach areas, roughing lines, small ports, any orifice larger than 5/8”(.625). - Injector Tube Probe:
Part Number: 4401501
APPLICATIONS: Specifically designed for the interior of Novellus gas injection tubes, and other gas tubes, small gas lines, and any orifice larger than 3/10”(.30). - Cassette Probes:
3 sizes
Part Number:
65mm = 4400712
150mm = 4400515
200mm = 4401480
APPLICATIONS: designed for 65mm (hard disk), 150mm, and 200mm wafer cassettes. - Novellus Injector Tube Probe:
Part Number: 4401514
APPLICATIONS: Specifically designed for the single Novellus top gas injector. - Custom probe:
Custom probes can be discussed for special surface structures in addition to the probes mentioned above.
0.5in probe
2in probe
Cassette Probes
injector tube probe
Novellus Injector Tube Probe
pencil probe
